The work aims to understand the general development situation and research status of vaporized hydrogen peroxide sterilization at home and abroad to propose new content and direction of research. Through access to plenty of documents and experiments carried by the subject group, the sterilization method concerning vaporized hydrogen peroxide was collected. Researches on and application of the current disinfection cases on vaporized hydrogen peroxide were summarized and classified. At the same time, corresponding solutions for the main technical problems existing in the sterilization of vaporized hydrogen peroxide were proposed. As a new and highly efficient method, vaporized hydrogen peroxide sterilization has been widely applied in biosafety laboratories and pharmaceutical industries. At present, it has been gradually applied to food packaging, especially in aseptic filling of beverage. The sterilization efficiency was to some extent related to H2O2 concentration, sterilization time and temperature, and so on. It has a broad space for development of vaporized hydrogen peroxide, although there are still some technical problems.