The work aims to establish a theoretical calculation model and a finite element model of screen printing plate deformation to study the effects of screen printing plate deformation on printing position accuracy. Based on the actual investigation, a three-dimensional model of screen printing plates was constructed. The possible deformation of screen printing plates and its effects on the accuracy of printing position was analyzed. A theoretical calculation model of screen distance, graphic position, pretension and other parameters was established. After the screen printing plate was reasonably simplified, a finite element model was constructed and calculated and analyzed. The results showed that the position error in both x and y directions increased with the increase of network distance, and the increasing trend was similar to the quadratic curve. The effect trend of graphic position on x-direction position error was similar to cubic curve, but there was a linear positive correlation with y-direction position error, and the position error in the center of screen printing plate was close to zero. There was a linear negative correlation between pretension and position error. The research shows that the theoretical calculation model of screen printing plate deformation is basically consistent with the finite element model. The model can better predict the effects of various parameters on position accuracy and guide the selection of parameters according to the printing position accuracy.