The work aims to design an atomic layer deposition equipment control system based on programmable logic controller (PLC) to improve the reliability of atomic deposition coating process and stabilize the film quality. According to the working principle and process requirements, as well as the characteristics of sensors and actuators, a hardware system scheme with Siemens S7-200 Smart PLC as the controller and MCGS 1070Gi touch screen as the man-machine interface was determined. All logic control was realized; and the "PID+PWM" technology was used to control the temperature of the heating area with the transistor output terminal of the PLC. The control system realized one-key operation of atomic deposition coating, which ensured high-precision temperature uniformity requirements (±1°C) during the coating process, and ensured equipment reliability and repeatability of deposited films. After practical application, it is proved that the control system has the advantages of good stability, small error and high degree of automation, and meets the technological requirements.