This study aims to investigate the process of multi-pulse laser drilling film by finite element method, and to explore the feasibility of birth and death element method in film laser drilling. Based on the birth and death element method in Ansys, the two-dimensional transient temperature field model of film by multi-pulse laser drilling was established and analyzed by using APDL language, and the simulation result was verified by experiments. The simulation result was consistent with the experimental results. The diameter and depth of micropore gradually increased with the increase of pulse times. The film has the highest temperature at the axis of the laser beam, and the temperature on both sides of the axis decreases gradually. The high temperature region increases gradually with the increase of the pulse times. The maximum error of micropore depth is 23.51%, the average error is 12.21%, and the root mean square error (RMSE) is 1.573 μm. The maximum error of upper micropore diameter is 3.64%, the average error is 2.77%, and the RMSE is 2.215 μm. It is reliable to simulate the multi-pulse laser drilling film by using APDL language program combined with birth and death element method.