The work aims to design a micro-nano precision positioning device with pure translational motion along x, y and z direction. Firstly, the screw and reciprocal screw theory were used to verify the kinetic characteristic of the designed traditional 3-UPU parallel mechanism. The closed vector mapping principle was adopted to construct the differential Jacobian of 3-UPU parallel mechanism to realize the spatial mapping relation between the joints and the moving platform. Then, the objective function used to optimize problem was defined as structural stiffness and constraint function as the volume ratio. The kinetic characteristic condition was the SIMP model of 3-UPU compliant parallel mechanism built by differential Jacobian and solved by optimization algorithm. Finally, the CAD model was extracted for optimized configuration based on Ossmooth, and the mechanical simulation analysis of the kinetic characteristics was completed. Furthermore, the processed CAD model was produced by 3D printing, and the experimental test of kinetic characteristics was completed. Through simulation, the compliance value of the optimized configuration declined from 58.324 mm/N to 25.993 mm/N, the first order natural frequency increased from 964.64 Hz to 1362.26 Hz, the micro kinetic characteristics along x, y and z direction reached 2.488, 6.512 and 9.185 μm respectively and the micro kinetic characteristics of the optimal configuration of 3-UPU compliant parallel mechanism was at the same micron level as the theoretical solution, which was verified by experimental test. Configuration of the topological optimization design has micron kinetic charac-teristics and micron positioning accuracy, and the feasibility of the optimization technique is verified by the experimental results.