PECVD法制备纳米多孔SiOx薄膜

PECVD法制备纳米多孔SiOx薄膜

曹玥, 王灿, 张改梅, 宋晓利, 陈强

Preparation of Nano-porous SiOx Films by PECVD Method

CAO Yue, WANG Can, ZHANG Gai-mei, SONG Xiao-li, CHEN Qiang

. 2017, (19): 35 -40 .