脉冲微波表面波PECVD在有机PET表面沉积DLC薄膜的阻隔性研究

周美丽, 岳蕾, 陈强

Barrier Properties of PET Coated by DLC Film through Microwave Surface Wave Plasma Enhanced Chemical Vapor Deposition

ZHOU Mei-li, YUE Lei, CHEN Qiang

. 2019, (17): 72 -80 . DOI: 10.19554/j.cnki.1001-3563.2019.17.011