LIG/PDMS温度应变传感器制备及解耦研究

顾锦涛; 耿婷; 邓琳; 朱庭璇; 许光毅; 刘富

doi:10.19554/j.cnki.1001-3563.2026.05.004

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包装工程（技术栏目） ›› 2026, Vol. 47 ›› Issue (5) : 27-35. DOI: 10.19554/j.cnki.1001-3563.2026.05.004

先进材料

LIG/PDMS温度应变传感器制备及解耦研究

顾锦涛¹, 耿婷¹, 邓琳², 朱庭璇¹, 许光毅¹, 刘富^1,*

作者信息 +

Fabrication and Decoupling of LIG/PDMS Temperature Strain Sensors

GU Jintao¹, GENG Ting¹, DENG Lin², ZHU Tingxuan¹, XU Guangyi¹, LIU Fu^1,*

Author information +

文章历史 +

摘要

目的针对现有LIG基传感器温度与应变耦合干扰、高温检测范围窄等问题,阐明LIG/PDMS复合材料的温度敏感机理,揭示温度对传感器核心性能的影响规律,建立耦合信号解耦模型,实现宽温域内温度与应变的精准检测。方法采用激光诱导法制备LIG/PDMS柔性传感器,通过四探针测试、SEM、拉曼光谱表征材料特性,结合温阻测试、应变测试及频率响应测试,系统分析温度对传感器性能的调控作用。结果确定5 W扫描功率、200 μm扫描间距为最优制备参数,LIG方阻最低达5.56 Ω/sq。复合材料温度响应源于PDMS热膨胀效应,25~214 ℃内ΔR/R₀与温度线性相关（R²=99.24%）。室温下应变灵敏度为83.6,100 ℃时温度对应变灵敏度的影响因子达0.027 8,温度对检测频率影响较小,100 ℃以下迟滞<5%。结论成功制备高性能LIG/PDMS复合材料,明确了温度对传感器性能的调控机制,建立的解耦模型实现了25~214 ℃温度与0~50%应变的有效分离,为复杂环境下多物理量传感提供了一种方案。

Abstract

To solve the problems of temperature and strain coupling interference and narrow high temperature detection range of the existing LIG based sensor, the work aims to clarify the temperature sensitive mechanism of LIG/PDMS composites, reveal theeffect of temperature on the core performance of the sensor and establish the coupling signal decoupling model to realize the accurate detection of temperature and strain in a wide temperature range. The LIG/PDMS flexible sensor was prepared by laser-induced method. The material properties were characterized by four-point probe measurement, SEM, and Raman spectroscopy. Combined with temperature-resistance test, strain test, and frequency response test, the regulatory effect of temperature on the sensor performance was systematically analyzed.It was determined that 5 W scanning power and 200 μm scanning spacing were the optimal preparation parameters, and the LIG square resistance was the lowest, reaching 5.56 Ω/sq. The temperature response of the composite was due to the thermal expansion effect of PDMS, and ΔR/R₀ had a good linear correlation with temperature in the range of 25-214 ℃ (R²=99.24%). When the strain sensitivity of the sensor was 83.6 at room temperature, at 100 ℃, the effect factor of temperature on the strain sensitivity was 0.027 8. The temperature had little effect on the detection frequency, and the hysteresis of the sensor below 100 ℃ was less than 5%. In this study, high-performance LIG/PDMS composites are successfully prepared, and the regulation mechanism of temperature on the sensor performance is clarified. The established decoupling model realizes effective decoupling at the temperature of 25-214 ℃ and the strain of 0-50%, which provides a scheme for multi physical quantity sensing in complex environments.

导出引用

顾锦涛, 耿婷, 邓琳, 朱庭璇, 许光毅, 刘富. LIG/PDMS温度应变传感器制备及解耦研究[J]. 包装工程. 2026, 47(5): 27-35 https://doi.org/10.19554/j.cnki.1001-3563.2026.05.004

GU Jintao, GENG Ting, DENG Lin, ZHU Tingxuan, XU Guangyi, LIU Fu. Fabrication and Decoupling of LIG/PDMS Temperature Strain Sensors[J]. Packaging Engineering. 2026, 47(5): 27-35 https://doi.org/10.19554/j.cnki.1001-3563.2026.05.004

中图分类号： TB34

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