目的 针对层次级联技术(HCT)在全指型声表面波(SAW)器件仿真中耗时较长的问题，以及使用无限元域(ILDB)边界条件时仿真容易出现数值不稳定从而带来误差的问题，需要采用有效的数值处理方法使仿真结果高效、准确。方法 通过对基本单元的有限元矩阵进行平衡预处理，使用单精度数值加快仿真;在消去内部自由度时，使用稳定度更高的LU分解，可以保证使用无限元域边界条件进行单精度仿真时结果的准确性。结果 对不同SAW器件进行了仿真测试对比验证，文中提出的优化后单精度HCT方法在降低了矩阵求逆导致的误差的同时，与传统的全指型级联方法相比，其仿真时间缩短了50%，且所提方法适用于ILDB边界条件。结论 文中提出的方法对快速精确设计声表面波传感器具有重要意义。

In addressing the issue of prolonged simulation time for Hierarchical Cascade Technology (HCT) in simulation of Surface Acoustic Wave (SAW) devices, as well as errors caused by numerical instability when using infinite long damping boundary (ILDB) conditions, effective numerical processing methods are needed to ensure efficient and accurate simulation results. Equilibrium preprocessing the finite element matrices of basic unit blocks, accelerating simulations with single-precision numerical computations, and employing LU decomposition when eliminating internal degrees of freedom could enhance the accuracy of simulation results when ILDB boundary conditions were used for single-precision simulations. Through simulation testing and comparative analysis on various Surface Acoustic Wave (SAW) devices, the optimized single-precision Hierarchical Cascade Technology (HCT) method proposed in this paper not only reduced simulation errors, but also reduced the simulation time by 50% compared with traditional hierarchical cascade methods. Furthermore, the proposed method was applicable to ILDB conditions. The approach developed in this paper holds significant importance for the rapid and accurate design of surface acoustic wave sensors.