目的 设计一种基于STM32主控制器芯片与FPGA从控制器芯片的激光切割高精度Z轴调高随动控制系统。方法 介绍该控制系统的工作原理、硬件设计、软件设计以及微电容测量电路的仿真实验。同时，针对系统随动过程中存在干扰的现象，提出基于滑动平均值滤波算法的改进滤波算法。结果 经过上机切割测试验证，该随动控制系统动态跟随精度为0.01 mm，最大跟随速度为500 mm/s。结论 该随动控制系统能够使激光切割机床实现高速高精度的切割。

The work aims to design a high-precision servo control system of Z-axis height adjustment for laser cutting based on an STM32 master controller chip and an FPGA slave controller chip. The principle, hardware design, software design and simulation experiment of micro capacitance measuring circuit of the control system were introduced. Aiming at the interference of servo control system, an improved filtering operator based on moving average filtering algorithm was put forward. Laser cutting test was conducted to verify the proposed method. The dynamic following accuracy of the servo control system was 0.01 mm, and the maximum following speed was 500 mm/s. The servo control system enables laser cutting machines to achieve high speed and high precision cutting effect.