目的 利用有限元方法研究薄膜多脉冲激光打孔过程，探究生死单元法运用在薄膜激光打孔中的可行性。方法 基于Ansys中的生死单元法，使用Ansys参数化设计语言(APDL)编写程序，建立薄膜多脉冲激光打孔的二维瞬态温度场模型并进行仿真分析，测量孔深、上孔径，对仿真结果进行实验验证。结果 仿真与实验结果趋势一致，微孔孔径与孔深随脉冲次数的增加而逐渐增加;孔深最大误差为23.51%，平均误差为12.21%，均方根误差为1.573 μm;上孔径最大误差为3.64%，平均误差为2.77%，均方根误差为2.215 μm;薄膜在激光束轴心处温度最高，轴心两侧温度逐渐降低，高温区域随着脉冲次数增加而逐渐增大。结论 使用APDL语言程序结合生死单元法对薄膜多脉冲激光打孔进行仿真分析，结果可靠。

This study aims to investigate the process of multi-pulse laser drilling film by finite element method, and to explore the feasibility of birth and death element method in film laser drilling. Based on the birth and death element method in Ansys, the two-dimensional transient temperature field model of film by multi-pulse laser drilling was established and analyzed by using APDL language, and the simulation result was verified by experiments. The simulation result was consistent with the experimental results. The diameter and depth of micropore gradually increased with the increase of pulse times. The film has the highest temperature at the axis of the laser beam, and the temperature on both sides of the axis decreases gradually. The high temperature region increases gradually with the increase of the pulse times. The maximum error of micropore depth is 23.51%, the average error is 12.21%, and the root mean square error (RMSE) is 1.573 μm. The maximum error of upper micropore diameter is 3.64%, the average error is 2.77%, and the RMSE is 2.215 μm. It is reliable to simulate the multi-pulse laser drilling film by using APDL language program combined with birth and death element method.