目的 解决物理溅射沉积法制备的无机氧化物类高阻隔包装材料柔韧性不足，使用过程中易脆裂的问题。方法 采用射频磁控溅射技术（RF），以氧化锌（ZnO）、聚酰亚胺（PI）为靶材，在PET塑料表面同时沉积制备ZnO/PI/PET复合薄膜。详细分析PI的引入对ZnO阻隔层微观结构以及性能的影响，优化ZnO/PI/PET的溅射制备工艺。结果 沉积层微观形貌及包装性能受溅射功率密度比（PZnO/PPI）的影响较大。随着PZnO/PPI的降低，沉积层PI含量增加，阻隔层纳米颗粒由燕麦形状向球形转变，球径呈降低趋势。沉积层柔韧性提升明显，经过100次折叠后，没有明显裂纹产生（PZnO/PPI≤2）。在PZnO/PPI为2，氩气流量为40 mL/min，沉积时间为30 min，工作气压为0.5 Pa的条件下，ZnO/PI/PET复合阻隔薄膜对水蒸气、氧气的阻隔能力最为理想，水蒸气透过率为0.342 g/(m2∙d)，氧气透过率为0.365 mL/(m2∙d)。结论 适量PI片段的引入可以有效提升无机氧化物阻隔层的柔韧性及耐折叠能力，还可进一步提升复合沉积膜对水蒸气、氧气等气体小分子的阻隔能力。

The paper aims to solve the problem that inorganic oxide high barrier packing materials prepared by physical sputtering deposition are not flexible enough and likely to crack during service process. ZnO/PI/PET composite films were prepared on the PET plastic surface by RF magnetron sputtering with zinc oxide (ZnO) and polyimide (PI) as target materials. Herein, the influence of the introduction of PI on the microstructure and performance of ZnO barrier layer was analyzed in detail, the preparation process of ZnO/PI was optimized as well. The micromorphology and packing properties of the composite films were greatly influenced by the sputtering power density ratio (PZnO/PPI). With the decrease of PZnO/PPI, and PI content deposited increased, the shape of ZnO nanoparticles gradually changed from squeezed oatmeal to spherical nanoparticles, and the ball diameter size showed a decreasing trend. In addition, the flexibility of the sedimentary layer increased significantly. After 100 circles of folding, no obvious cracks were found (PZnO/PPI≤2). When the PZnO/PPI was 2, the argon flow rate was 40 mL/min, the deposition time was 30 min, and the working pressure was 0.5 Pa, the ZnO/PI/PET composite barrier film showed the best barrier capacity, with water vapor transmittance rate (WVTR) of 0.342 g/(m2∙d) and oxygen transmittance rate (OTR) of 0.365 mL/(m2∙d). Therefore, the introduction of proper amount PI fragment can effectively improve the flexibility and folding resistance of inorganic oxide barrier layer, and further improve the barrier ability of composite deposition film to small gas molecules such as water vapor and oxygen.