目的 为了进一步提高氧化锌（ZnO）沉积复合薄膜对氧气的阻隔能力，探索其应用于食品和药品包装材料的可行性。方法 采用射频磁控溅射技术（RF），以ZnO和二氧化硅（SiO2）为靶材，在PET塑料表面同时沉积，制备ZnO/SiO2复合薄膜包装材料，并详细分析SiO2的引入对ZnO沉积膜微观结构和阻隔能力的影响，优化ZnO/SiO2的制备工艺。结果 SiO2的引入，使ZnO纳米颗粒的形状由片状燕麦变成了球形，当功率密度比PSiO2/PZnO为0.67，氩气流量为20 mL/min，沉积时间为20 min，工作气压为0.5 Pa时，ZnO/SiO2复合薄膜的氧气透过率降低为0.462 mL/(m2•d)，水蒸气透过率有所增加，为0.367 g/(m2•d)。结论 引入合适比例的SiO2，可有效提升ZnO沉积层对氧气渗入的阻隔能力，但SiO2引入量过高时，会加剧纳米裂纹，对复合薄膜的阻隔能力不利。

The work aims to further improve the barrier ability to oxygen and the feasibility of zinc oxide (ZnO) deposited composite film in food and pharmaceutical packaging materials. With ZnO and SiO2 as targets, ZnO/SiO2 composite films were prepared and deposited on PET substrates via RF magnetron co-sputtering. The influence of SiO2 on the microstructure and barrier ability of ZnO deposited film was analyzed in detail, and the preparation process of ZnO/SiO2 was optimized. The introduction of SiO2 changed the shape of ZnO nanoparticles from flaky oat to sphere. When the power density ratio PSiO2/PZnO was 0.67, the Ar flux was 20 mL/min and the deposition time was 20 min. When the work pressure was 0.5 Pa, the OTR of ZnO/SiO2 composite film decreased to 0.462 mL/(m2•d), and the WVTR increased to 0.367 g/(m2•d). The introduction of appropriate proportion of SiO2 can effectively improve the barrier ability of ZnO deposit to oxygen penetration, but when the amount of SiO2 introduced is too high, nano-cracks will intensify, which is unfavorable to the barrier ability of the composite film.